Control of the refractive index in PECVD SiOxNy films (2000)
Alayo Chávez, Marco Isaías 
; Pereyra, Inés ; Scopel, Wanderla Luis ; Fantini, Márcia Carvalho de Abreu
Source: SBMicro 2000 : proceedings. Conference titles: International Conference on Microelectronics and Packaging. Unidades: EP, IF
Assunto: CIRCUITOS INTEGRADOS
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ABNT
ALAYO CHÁVEZ, Marco Isaías et al. Control of the refractive index in PECVD SiOxNy films. 2000, Anais.. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP, 2000. . Acesso em: 16 nov. 2025.APA
Alayo Chávez, M. I., Pereyra, I., Scopel, W. L., & Fantini, M. C. de A. (2000). Control of the refractive index in PECVD SiOxNy films. In SBMicro 2000 : proceedings. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP.NLM
Alayo Chávez MI, Pereyra I, Scopel WL, Fantini MC de A. Control of the refractive index in PECVD SiOxNy films. SBMicro 2000 : proceedings. 2000 ;[citado 2025 nov. 16 ]Vancouver
Alayo Chávez MI, Pereyra I, Scopel WL, Fantini MC de A. Control of the refractive index in PECVD SiOxNy films. SBMicro 2000 : proceedings. 2000 ;[citado 2025 nov. 16 ]
