Buergi, J.; Neuenschwander, R.; Kellermann, G.; Garcia Molleja, J.; Feugeas, J.; Craievich, Aldo Felix 
Fonte: REVIEW OF SCIENTIFIC INSTRUMENTS. Unidade: IF
Assuntos: FILMES FINOS, INSTRUMENTAÇÃO (FÍSICA)
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BUERGI, J. et al. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction. REVIEW OF SCIENTIFIC INSTRUMENTS, v. 84, n. ja2013, p. 015102, 2013Tradução . . Disponível em: https://doi.org/10.1063/1.4773002. Acesso em: 09 nov. 2025.APA
Buergi, J., Neuenschwander, R., Kellermann, G., Garcia Molleja, J., Feugeas, J., & Craievich, A. F. (2013). Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction. REVIEW OF SCIENTIFIC INSTRUMENTS, 84( ja2013), 015102. doi:10.1063/1.4773002NLM
Buergi J, Neuenschwander R, Kellermann G, Garcia Molleja J, Feugeas J, Craievich AF. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction [Internet]. REVIEW OF SCIENTIFIC INSTRUMENTS. 2013 ; 84( ja2013): 015102.[citado 2025 nov. 09 ] Available from: https://doi.org/10.1063/1.4773002Vancouver
Buergi J, Neuenschwander R, Kellermann G, Garcia Molleja J, Feugeas J, Craievich AF. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction [Internet]. REVIEW OF SCIENTIFIC INSTRUMENTS. 2013 ; 84( ja2013): 015102.[citado 2025 nov. 09 ] Available from: https://doi.org/10.1063/1.4773002
