Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction (2013)
- Authors:
- Autor USP: CRAIEVICH, ALDO FELIX - IF
- Unidade: IF
- DOI: https://doi.org/10.1063/1.4773002
- Subjects: FILMES FINOS; INSTRUMENTAÇÃO (FÍSICA)
- Language: Inglês
- Imprenta:
- Source:
- Título do periódico: REVIEW OF SCIENTIFIC INSTRUMENTS
- Volume/Número/Paginação/Ano: v. 84, n. 1, p. 015102, jan.2013
- Este periódico é de assinatura
- Este artigo é de acesso aberto
- URL de acesso aberto
- Cor do Acesso Aberto: green
- Licença: cc-by-nc-nd
-
ABNT
BUERGI, J. et al. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction. REVIEW OF SCIENTIFIC INSTRUMENTS, v. 84, n. ja2013, p. 015102, 2013Tradução . . Disponível em: https://repositorio.usp.br/directbitstream/cfa9ea31-1fc2-4893-b99d-22555dc05a04/Reactive%20sputter%20magnetron%20reactor%20for%20preparation%20of%20thin%20films%20and%20simultaneous%20in%20situ%20structural%20study%20by%20X-ray%20diffraction_%20Review%20of%20Scientific%20Instruments_%20Vol%2084%2C%20No%201.pdf. Acesso em: 03 jun. 2023. -
APA
Buergi, J., Neuenschwander, R., Kellermann, G., Garcia Molleja, J., Feugeas, J., & Craievich, A. F. (2013). Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction. REVIEW OF SCIENTIFIC INSTRUMENTS, 84( ja2013), 015102. doi:https://doi.org/10.1063/1.4773002 -
NLM
Buergi J, Neuenschwander R, Kellermann G, Garcia Molleja J, Feugeas J, Craievich AF. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction [Internet]. REVIEW OF SCIENTIFIC INSTRUMENTS. 2013 ; 84( ja2013): 015102.[citado 2023 jun. 03 ] Available from: https://repositorio.usp.br/directbitstream/cfa9ea31-1fc2-4893-b99d-22555dc05a04/Reactive%20sputter%20magnetron%20reactor%20for%20preparation%20of%20thin%20films%20and%20simultaneous%20in%20situ%20structural%20study%20by%20X-ray%20diffraction_%20Review%20of%20Scientific%20Instruments_%20Vol%2084%2C%20No%201.pdf -
Vancouver
Buergi J, Neuenschwander R, Kellermann G, Garcia Molleja J, Feugeas J, Craievich AF. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction [Internet]. REVIEW OF SCIENTIFIC INSTRUMENTS. 2013 ; 84( ja2013): 015102.[citado 2023 jun. 03 ] Available from: https://repositorio.usp.br/directbitstream/cfa9ea31-1fc2-4893-b99d-22555dc05a04/Reactive%20sputter%20magnetron%20reactor%20for%20preparation%20of%20thin%20films%20and%20simultaneous%20in%20situ%20structural%20study%20by%20X-ray%20diffraction_%20Review%20of%20Scientific%20Instruments_%20Vol%2084%2C%20No%201.pdf - The International Conference on Small-Angle Scattering: past and future
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Informações sobre o DOI: https://doi.org/10.1063/1.4773002 (Fonte: oaDOI API)
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