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A method for deposition rate estimation on a low-cost home-built DC sputter system (2022)
Pinto, H. M.; Jasinevicius, Renato Goulart; Cirino, G. A.
Conference titles: Symposium on Microelectronics Technology and Devices - SBMicro. Unidade: EESC
Subjects: FILMES FINOS, SEMICONDUTORES, ENGENHARIA MECÂNICA
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
PINTO, H. M. e JASINEVICIUS, Renato Goulart e CIRINO, G. A. A method for deposition rate estimation on a low-cost home-built DC sputter system. 2022, Anais.. Piscataway, NJ, USA: IEEE, 2022. Disponível em: https://doi.org/10.1109/SBMICRO55822.2022.9881038. Acesso em: 02 out. 2024.
APA
Pinto, H. M., Jasinevicius, R. G., & Cirino, G. A. (2022). A method for deposition rate estimation on a low-cost home-built DC sputter system. In . Piscataway, NJ, USA: IEEE. doi:10.1109/SBMICRO55822.2022.9881038
NLM
Pinto HM, Jasinevicius RG, Cirino GA. A method for deposition rate estimation on a low-cost home-built DC sputter system [Internet]. 2022 ;[citado 2024 out. 02 ] Available from: https://doi.org/10.1109/SBMICRO55822.2022.9881038
Vancouver
Pinto HM, Jasinevicius RG, Cirino GA. A method for deposition rate estimation on a low-cost home-built DC sputter system [Internet]. 2022 ;[citado 2024 out. 02 ] Available from: https://doi.org/10.1109/SBMICRO55822.2022.9881038
Artigo de periodico
Tuning the photoconductivity of Co3O4 thin films by defect engineering (2022)
Silva, Ana Luiza Costa; Rodrigues, Ariano de Giovanni; Jasinevicius, Renato Goulart; Godoy, Marcio Peron Franco de
Source: Applied Surface Science. Unidade: EESC
Subjects: FOTOCONDUTIVIDADE, FILMES FINOS, ENGENHARIA MECÂNICA
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
SILVA, Ana Luiza Costa et al. Tuning the photoconductivity of Co3O4 thin films by defect engineering. Applied Surface Science, v. 606, p. 1-9, 2022Tradução . . Disponível em: https://doi.org/10.1016/j.apsusc.2022.154943. Acesso em: 02 out. 2024.
APA
Silva, A. L. C., Rodrigues, A. de G., Jasinevicius, R. G., & Godoy, M. P. F. de. (2022). Tuning the photoconductivity of Co3O4 thin films by defect engineering. Applied Surface Science, 606, 1-9. doi:10.1016/j.apsusc.2022.154943
NLM
Silva ALC, Rodrigues A de G, Jasinevicius RG, Godoy MPF de. Tuning the photoconductivity of Co3O4 thin films by defect engineering [Internet]. Applied Surface Science. 2022 ; 606 1-9.[citado 2024 out. 02 ] Available from: https://doi.org/10.1016/j.apsusc.2022.154943
Vancouver
Silva ALC, Rodrigues A de G, Jasinevicius RG, Godoy MPF de. Tuning the photoconductivity of Co3O4 thin films by defect engineering [Internet]. Applied Surface Science. 2022 ; 606 1-9.[citado 2024 out. 02 ] Available from: https://doi.org/10.1016/j.apsusc.2022.154943
Artigo de periodico
Effect of the initial structure of silicon surface on the generation of multiple structural phases by cyclic microindentation (2006)
Pizani, Paulo Sérgio; Jasinevicius, Renato Goulart; Zanatta, Antonio Ricardo
Source: Applied Physics Letters. Unidades: EESC, IFSC
Subjects: ESPECTROSCOPIA RAMAN, FILMES FINOS, SILICONE
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
PIZANI, Paulo Sérgio e JASINEVICIUS, Renato Goulart e ZANATTA, Antonio Ricardo. Effect of the initial structure of silicon surface on the generation of multiple structural phases by cyclic microindentation. Applied Physics Letters, v. 89, n. 3, p. 031917-1-031917-3, 2006Tradução . . Disponível em: https://doi.org/10.1063/1.2227644. Acesso em: 02 out. 2024.
APA
Pizani, P. S., Jasinevicius, R. G., & Zanatta, A. R. (2006). Effect of the initial structure of silicon surface on the generation of multiple structural phases by cyclic microindentation. Applied Physics Letters, 89( 3), 031917-1-031917-3. doi:10.1063/1.2227644
NLM
Pizani PS, Jasinevicius RG, Zanatta AR. Effect of the initial structure of silicon surface on the generation of multiple structural phases by cyclic microindentation [Internet]. Applied Physics Letters. 2006 ; 89( 3): 031917-1-031917-3.[citado 2024 out. 02 ] Available from: https://doi.org/10.1063/1.2227644
Vancouver
Pizani PS, Jasinevicius RG, Zanatta AR. Effect of the initial structure of silicon surface on the generation of multiple structural phases by cyclic microindentation [Internet]. Applied Physics Letters. 2006 ; 89( 3): 031917-1-031917-3.[citado 2024 out. 02 ] Available from: https://doi.org/10.1063/1.2227644

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