Highly conductive n-type MC-Si:H films deposited at very low temperature (2002)
Nardes, Alexandre Mantovani; Dirani, Ely Antonio Tadeu 
; Andrade, Adnei Melges de ; Fonseca, Fernando Josepetti
Source: Microelectronics Technology and Devices SBMICRO 2002. Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO 2002. Unidade: EP
Assunto: MICROELETRÔNICA
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ABNT
NARDES, Alexandre Mantovani et al. Highly conductive n-type MC-Si:H films deposited at very low temperature. Microelectronics Technology and Devices SBMICRO 2002. Tradução . Pennington: The Electrochemical Society, 2002. . . Acesso em: 17 nov. 2025.APA
Nardes, A. M., Dirani, E. A. T., Andrade, A. M. de, & Fonseca, F. J. (2002). Highly conductive n-type MC-Si:H films deposited at very low temperature. In Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society.NLM
Nardes AM, Dirani EAT, Andrade AM de, Fonseca FJ. Highly conductive n-type MC-Si:H films deposited at very low temperature. In: Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society; 2002. [citado 2025 nov. 17 ]Vancouver
Nardes AM, Dirani EAT, Andrade AM de, Fonseca FJ. Highly conductive n-type MC-Si:H films deposited at very low temperature. In: Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society; 2002. [citado 2025 nov. 17 ]
