Low temperature pecvd silicon oxide (1995)
Source: Proceedings. Conference titles: Congress of the Brazilian Microelectronics Society. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
ABNT
PEREYRA, Inés e ALAYO CHÁVEZ, Marco Isaías. Low temperature pecvd silicon oxide. 1995, Anais.. Porto Alegre: Instituto de Informatica da Ufrgs, 1995. . Acesso em: 15 ago. 2024.APA
Pereyra, I., & Alayo Chávez, M. I. (1995). Low temperature pecvd silicon oxide. In Proceedings. Porto Alegre: Instituto de Informatica da Ufrgs.NLM
Pereyra I, Alayo Chávez MI. Low temperature pecvd silicon oxide. Proceedings. 1995 ;[citado 2024 ago. 15 ]Vancouver
Pereyra I, Alayo Chávez MI. Low temperature pecvd silicon oxide. Proceedings. 1995 ;[citado 2024 ago. 15 ]