Local structure and bonds of amorphous silicon oxynitride thin films (2002)
Scopel, Wanderla Luis 
; Fantini, Márcia Carvalho de Abreu ; Alayo Chávez, Marco Isaías ; Pereyra, Inés
Source: Thin Solid Films. Unidades: IF, EP
Subjects: ESPECTROSCOPIA DE RAIO X, ESPECTROMETRIA, FILMES FINOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
SCOPEL, Wanderla Luis et al. Local structure and bonds of amorphous silicon oxynitride thin films. Thin Solid Films, v. 413, n. 1-2, p. 59-64, 2002Tradução . . Disponível em: https://doi.org/10.1016/s0040-6090(02)00346-2. Acesso em: 14 set. 2024.APA
Scopel, W. L., Fantini, M. C. de A., Alayo Chávez, M. I., & Pereyra, I. (2002). Local structure and bonds of amorphous silicon oxynitride thin films. Thin Solid Films, 413( 1-2), 59-64. doi:10.1016/s0040-6090(02)00346-2NLM
Scopel WL, Fantini MC de A, Alayo Chávez MI, Pereyra I. Local structure and bonds of amorphous silicon oxynitride thin films [Internet]. Thin Solid Films. 2002 ; 413( 1-2): 59-64.[citado 2024 set. 14 ] Available from: https://doi.org/10.1016/s0040-6090(02)00346-2Vancouver
Scopel WL, Fantini MC de A, Alayo Chávez MI, Pereyra I. Local structure and bonds of amorphous silicon oxynitride thin films [Internet]. Thin Solid Films. 2002 ; 413( 1-2): 59-64.[citado 2024 set. 14 ] Available from: https://doi.org/10.1016/s0040-6090(02)00346-2
