Description and characterization of a ECR plasma device developed for thin film deposition (2003)
Source: Brazilian Journal of Physics. Unidade: IF
Assunto: FILMES FINOS
ABNT
MATTA, J A S da et al. Description and characterization of a ECR plasma device developed for thin film deposition. Brazilian Journal of Physics, v. 33, n. 1, p. 123-127, 2003Tradução . . Disponível em: https://doi.org/10.1590/s0103-97332003000100011. Acesso em: 18 ago. 2024.APA
Matta, J. A. S. da, Galvao, R. M. O., Ruchko, L., Fantini, M. C. de A., & Kiyohara, P. K. (2003). Description and characterization of a ECR plasma device developed for thin film deposition. Brazilian Journal of Physics, 33( 1), 123-127. doi:10.1590/s0103-97332003000100011NLM
Matta JAS da, Galvao RMO, Ruchko L, Fantini MC de A, Kiyohara PK. Description and characterization of a ECR plasma device developed for thin film deposition [Internet]. Brazilian Journal of Physics. 2003 ; 33( 1): 123-127.[citado 2024 ago. 18 ] Available from: https://doi.org/10.1590/s0103-97332003000100011Vancouver
Matta JAS da, Galvao RMO, Ruchko L, Fantini MC de A, Kiyohara PK. Description and characterization of a ECR plasma device developed for thin film deposition [Internet]. Brazilian Journal of Physics. 2003 ; 33( 1): 123-127.[citado 2024 ago. 18 ] Available from: https://doi.org/10.1590/s0103-97332003000100011