End-point detection of polymer etching using Lagmuir probes (2000)
Castro, Raul Murete de; Verdonck, Patrick Bernard; Pisani, Marcelo B.; Mansano, Ronaldo Domingues 
; Cirino, Giuseppe Antonio; Maciel, Homero Santiago; Massi, Marcos
Source: IEEE Transactions on Plasma Science. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
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ABNT
CASTRO, Raul Murete de et al. End-point detection of polymer etching using Lagmuir probes. IEEE Transactions on Plasma Science, v. 28, n. Ju 2000, p. 1043-1049, 2000Tradução . . Disponível em: https://doi.org/10.1109/27.887774. Acesso em: 03 out. 2024.APA
Castro, R. M. de, Verdonck, P. B., Pisani, M. B., Mansano, R. D., Cirino, G. A., Maciel, H. S., & Massi, M. (2000). End-point detection of polymer etching using Lagmuir probes. IEEE Transactions on Plasma Science, 28( Ju 2000), 1043-1049. doi:10.1109/27.887774NLM
Castro RM de, Verdonck PB, Pisani MB, Mansano RD, Cirino GA, Maciel HS, Massi M. End-point detection of polymer etching using Lagmuir probes [Internet]. IEEE Transactions on Plasma Science. 2000 ; 28( Ju 2000): 1043-1049.[citado 2024 out. 03 ] Available from: https://doi.org/10.1109/27.887774Vancouver
Castro RM de, Verdonck PB, Pisani MB, Mansano RD, Cirino GA, Maciel HS, Massi M. End-point detection of polymer etching using Lagmuir probes [Internet]. IEEE Transactions on Plasma Science. 2000 ; 28( Ju 2000): 1043-1049.[citado 2024 out. 03 ] Available from: https://doi.org/10.1109/27.887774
