a-Si:H thin films deposited at low temperature by sputtering (2010)
Nunes, Carolina Carvalho Previdi; Zambom, Luís da Silva 
; Mansano, Ronaldo Domingues
Source: Microelectronics Technology and Devices - SBMicro 2010. Unidade: EP
Assunto: ELETROQUÍMICA
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ABNT
NUNES, Carolina Carvalho Previdi e ZAMBOM, Luís da Silva e MANSANO, Ronaldo Domingues. a-Si:H thin films deposited at low temperature by sputtering. Microelectronics Technology and Devices - SBMicro 2010, v. 31, n. 1, p. 135-142, 2010Tradução . . Disponível em: https://doi.org/10.1149/1.3474151. Acesso em: 03 out. 2024.APA
Nunes, C. C. P., Zambom, L. da S., & Mansano, R. D. (2010). a-Si:H thin films deposited at low temperature by sputtering. Microelectronics Technology and Devices - SBMicro 2010, 31( 1), 135-142. doi:10.1149/1.3474151NLM
Nunes CCP, Zambom L da S, Mansano RD. a-Si:H thin films deposited at low temperature by sputtering [Internet]. Microelectronics Technology and Devices - SBMicro 2010. 2010 ;31( 1): 135-142.[citado 2024 out. 03 ] Available from: https://doi.org/10.1149/1.3474151Vancouver
Nunes CCP, Zambom L da S, Mansano RD. a-Si:H thin films deposited at low temperature by sputtering [Internet]. Microelectronics Technology and Devices - SBMicro 2010. 2010 ;31( 1): 135-142.[citado 2024 out. 03 ] Available from: https://doi.org/10.1149/1.3474151
