The applicability of Langmuir probes for end point detection of polymer etching (1999)
Source: ICMP 99: technical digest. Conference titles: International Conference on Microelectronics and Packaging. Unidade: EP
Assunto: FILMES
ABNT
MANSANO, Ronaldo Domingues et al. The applicability of Langmuir probes for end point detection of polymer etching. 1999, Anais.. São Paulo: SBMicro/IMAPS, 1999. . Acesso em: 26 ago. 2024.APA
Mansano, R. D., Nogueira, P. M., Zambom, L. da S., Verdonck, P. B., Massi, M., & Maciel, H. S. (1999). The applicability of Langmuir probes for end point detection of polymer etching. In ICMP 99: technical digest. São Paulo: SBMicro/IMAPS.NLM
Mansano RD, Nogueira PM, Zambom L da S, Verdonck PB, Massi M, Maciel HS. The applicability of Langmuir probes for end point detection of polymer etching. ICMP 99: technical digest. 1999 ;[citado 2024 ago. 26 ]Vancouver
Mansano RD, Nogueira PM, Zambom L da S, Verdonck PB, Massi M, Maciel HS. The applicability of Langmuir probes for end point detection of polymer etching. ICMP 99: technical digest. 1999 ;[citado 2024 ago. 26 ]