Gonçalves Neto, Luiz; Cirino, Giuseppe Antonio; Mansano, Ronaldo Domingues 
; Cardona, Patricia Soares Pinto; Verdonck, Patrick Bernard
Source: Proceedings of SPIE. Conference titles: Micromachining Technology for Micro-Optics and Nano-Optics. Unidades: EESC, EP
Subjects: ÓPTICA ELETRÔNICA, MICROELETRÔNICA
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ABNT
GONÇALVES NETO, Luiz et al. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. Disponível em: https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdf. Acesso em: 11 nov. 2025. , 2003APA
Gonçalves Neto, L., Cirino, G. A., Mansano, R. D., Cardona, P. S. P., & Verdonck, P. B. (2003). Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. Recuperado de https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdfNLM
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates [Internet]. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2025 nov. 11 ] Available from: https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdfVancouver
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates [Internet]. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2025 nov. 11 ] Available from: https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdf
