Silicon micromechanical structures fabricated by electrochemical process (2002)
Dantas, M. O. S.; Galeazzo, Elisabete 
; Pees, H. E. M.; Ramírez Fernandez, Francisco Javier
Source: Proceedings. Conference titles: Conference on Sensors. Unidade: EP
Assunto: MICROELETRÔNICA
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ABNT
DANTAS, M. O. S. et al. Silicon micromechanical structures fabricated by electrochemical process. 2002, Anais.. Piscataway: IEEE, 2002. . Acesso em: 02 out. 2024.APA
Dantas, M. O. S., Galeazzo, E., Pees, H. E. M., & Ramírez Fernandez, F. J. (2002). Silicon micromechanical structures fabricated by electrochemical process. In Proceedings. Piscataway: IEEE.NLM
Dantas MOS, Galeazzo E, Pees HEM, Ramírez Fernandez FJ. Silicon micromechanical structures fabricated by electrochemical process. Proceedings. 2002 ;[citado 2024 out. 02 ]Vancouver
Dantas MOS, Galeazzo E, Pees HEM, Ramírez Fernandez FJ. Silicon micromechanical structures fabricated by electrochemical process. Proceedings. 2002 ;[citado 2024 out. 02 ]
