Source: Journal of Vacuum Science and Technology B. Unidade: EP
Assunto: DIELÉTRICOS
ABNT
ALBERTIN, Katia Franklin e PEREYRA, Inés. Study of metal oxide-semiconductor capacitors with rf magnetron sputtering TiOx and TiOxNy gate dielectric layer. Journal of Vacuum Science and Technology B, v. 27, n. ja/feb. 2009, p. 236-245, 2009Tradução . . Acesso em: 18 fev. 2026.APA
Albertin, K. F., & Pereyra, I. (2009). Study of metal oxide-semiconductor capacitors with rf magnetron sputtering TiOx and TiOxNy gate dielectric layer. Journal of Vacuum Science and Technology B, 27( ja/feb. 2009), 236-245.NLM
Albertin KF, Pereyra I. Study of metal oxide-semiconductor capacitors with rf magnetron sputtering TiOx and TiOxNy gate dielectric layer. Journal of Vacuum Science and Technology B. 2009 ; 27( ja/feb. 2009): 236-245.[citado 2026 fev. 18 ]Vancouver
Albertin KF, Pereyra I. Study of metal oxide-semiconductor capacitors with rf magnetron sputtering TiOx and TiOxNy gate dielectric layer. Journal of Vacuum Science and Technology B. 2009 ; 27( ja/feb. 2009): 236-245.[citado 2026 fev. 18 ]
