MEMS-based ultrasound transducer: CMUT modeling and fabrication process (2012)
Fonte: Microelectronics technology and devices, SBMicro. Nome do evento: International Symposium on Microelectronics Technology and Devices. Unidade: EP
Assunto: MICROELETRÔNICA
ABNT
OLIVEIRA, Victor Inacio de et al. MEMS-based ultrasound transducer: CMUT modeling and fabrication process. 2012, Anais.. Pennington: Escola Politécnica, Universidade de São Paulo, 2012. Disponível em: https://doi.org/10.1149/04901.0431ecst. Acesso em: 02 nov. 2024.APA
Oliveira, V. I. de, Ibrahim, R. C., Barros, E. A. de, Mendonça, L. G. D., Lima, B. L. S. de, Piazzeta, M. H. de O., & Gobbi, A. L. (2012). MEMS-based ultrasound transducer: CMUT modeling and fabrication process. In Microelectronics technology and devices, SBMicro. Pennington: Escola Politécnica, Universidade de São Paulo. doi:10.1149/04901.0431ecstNLM
Oliveira VI de, Ibrahim RC, Barros EA de, Mendonça LGD, Lima BLS de, Piazzeta MH de O, Gobbi AL. MEMS-based ultrasound transducer: CMUT modeling and fabrication process [Internet]. Microelectronics technology and devices, SBMicro. 2012 ;[citado 2024 nov. 02 ] Available from: https://doi.org/10.1149/04901.0431ecstVancouver
Oliveira VI de, Ibrahim RC, Barros EA de, Mendonça LGD, Lima BLS de, Piazzeta MH de O, Gobbi AL. MEMS-based ultrasound transducer: CMUT modeling and fabrication process [Internet]. Microelectronics technology and devices, SBMicro. 2012 ;[citado 2024 nov. 02 ] Available from: https://doi.org/10.1149/04901.0431ecst