Huanca, Danilo Roque 
; Christiano, Veronica; Adelmann, Christoph; Kellerman, Guinther ; Verdonck, Patrick Bernard; Santos Filho, Sebastião Gomes dos
Fonte: Microelectronics technology and devices, SBMicro. Nome do evento: International Symposium on Microelectronics Technology and Devices. Unidade: EP
Assunto: MICROELETRÔNICA
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
HUANCA, Danilo Roque et al. Hafnium aluminates deposited by atomic layer deposition: structural characterization by X-ray spectroscopy. 2012, Anais.. Pennington: Escola Politécnica, Universidade de São Paulo, 2012. Disponível em: https://doi.org/10.1149/04901.0383ecst. Acesso em: 11 out. 2024.APA
Huanca, D. R., Christiano, V., Adelmann, C., Kellerman, G., Verdonck, P. B., & Santos Filho, S. G. dos. (2012). Hafnium aluminates deposited by atomic layer deposition: structural characterization by X-ray spectroscopy. In Microelectronics technology and devices, SBMicro. Pennington: Escola Politécnica, Universidade de São Paulo. doi:10.1149/04901.0383ecstNLM
Huanca DR, Christiano V, Adelmann C, Kellerman G, Verdonck PB, Santos Filho SG dos. Hafnium aluminates deposited by atomic layer deposition: structural characterization by X-ray spectroscopy [Internet]. Microelectronics technology and devices, SBMicro. 2012 ;[citado 2024 out. 11 ] Available from: https://doi.org/10.1149/04901.0383ecstVancouver
Huanca DR, Christiano V, Adelmann C, Kellerman G, Verdonck PB, Santos Filho SG dos. Hafnium aluminates deposited by atomic layer deposition: structural characterization by X-ray spectroscopy [Internet]. Microelectronics technology and devices, SBMicro. 2012 ;[citado 2024 out. 11 ] Available from: https://doi.org/10.1149/04901.0383ecst
