Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films (2020)
Fonte: SN Applied Sciences. Unidades: EP, IPEN
Assuntos: MICROSCÓPIO ELETRÔNICO, FILMES FINOS, MATERIAIS
ABNT
SILVA, Felipe Carneiro da et al. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences, v. 2, 2020Tradução . . Disponível em: https://doi.org/10.1007/s42452-020-2617-3. Acesso em: 25 ago. 2024.APA
Silva, F. C. da, Tunes, M. A., Edmondson, P. D., Lima, N. B. de, Sagás, J. C., Fontana, L. C., & Schön, C. G. (2020). Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences, 2. doi:10.1007/s42452-020-2617-3NLM
Silva FC da, Tunes MA, Edmondson PD, Lima NB de, Sagás JC, Fontana LC, Schön CG. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films [Internet]. SN Applied Sciences. 2020 ;2[citado 2024 ago. 25 ] Available from: https://doi.org/10.1007/s42452-020-2617-3Vancouver
Silva FC da, Tunes MA, Edmondson PD, Lima NB de, Sagás JC, Fontana LC, Schön CG. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films [Internet]. SN Applied Sciences. 2020 ;2[citado 2024 ago. 25 ] Available from: https://doi.org/10.1007/s42452-020-2617-3