The role of the species formed in PECVD systems on the density of state of a Si:H films (1990)
Martins, R.; Vieira, M.; Fortunato, E.; Santos, M.; Dirani, Ely Antonio Tadeu 
; Carvalho, N.; Baia, I.; Guimarães, I.
Fonte: Materials Research Society Symposium Proceedings. Unidade: EP
Assunto: DISPOSITIVOS ELETRÔNICOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
MARTINS, R. et al. The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings, v. 192, p. 175-180, 1990Tradução . . Acesso em: 23 jul. 2024.APA
Martins, R., Vieira, M., Fortunato, E., Santos, M., Dirani, E. A. T., Carvalho, N., et al. (1990). The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings, 192, 175-180.NLM
Martins R, Vieira M, Fortunato E, Santos M, Dirani EAT, Carvalho N, Baia I, Guimarães I. The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings. 1990 ; 192 175-180.[citado 2024 jul. 23 ]Vancouver
Martins R, Vieira M, Fortunato E, Santos M, Dirani EAT, Carvalho N, Baia I, Guimarães I. The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings. 1990 ; 192 175-180.[citado 2024 jul. 23 ]
