The role of the species formed in PECVD systems on the density of state of a Si:H films (1990)
Martins, R.; Vieira, M.; Fortunato, E.; Santos, M.; Dirani, Ely Antonio Tadeu 
; Carvalho, N.; Baia, I.; Guimarães, I.
Source: Materials Research Society Symposium Proceedings. Unidade: EP
Assunto: DISPOSITIVOS ELETRÔNICOS
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MARTINS, R. et al. The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings, v. 192, p. 175-180, 1990Tradução . . Acesso em: 02 nov. 2024.APA
Martins, R., Vieira, M., Fortunato, E., Santos, M., Dirani, E. A. T., Carvalho, N., et al. (1990). The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings, 192, 175-180.NLM
Martins R, Vieira M, Fortunato E, Santos M, Dirani EAT, Carvalho N, Baia I, Guimarães I. The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings. 1990 ; 192 175-180.[citado 2024 nov. 02 ]Vancouver
Martins R, Vieira M, Fortunato E, Santos M, Dirani EAT, Carvalho N, Baia I, Guimarães I. The role of the species formed in PECVD systems on the density of state of a Si:H films. Materials Research Society Symposium Proceedings. 1990 ; 192 175-180.[citado 2024 nov. 02 ]
