Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films (2020)
Silva, Felipe Carneiro da 
; Tunes, Matheus Araujo ; Edmondson, Philip D. ; Lima, Nelson Batista de ; Sagás, Julio Cesar ; Fontana, Luis César ; Schön, Cláudio Geraldo
Source: SN Applied Sciences. Unidades: EP, IPEN
Subjects: MICROSCÓPIO ELETRÔNICO, FILMES FINOS, MATERIAIS
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SILVA, Felipe Carneiro da et al. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences, v. 2, 2020Tradução . . Disponível em: https://doi.org/10.1007/s42452-020-2617-3. Acesso em: 11 out. 2024.APA
Silva, F. C. da, Tunes, M. A., Edmondson, P. D., Lima, N. B. de, Sagás, J. C., Fontana, L. C., & Schön, C. G. (2020). Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences, 2. doi:10.1007/s42452-020-2617-3NLM
Silva FC da, Tunes MA, Edmondson PD, Lima NB de, Sagás JC, Fontana LC, Schön CG. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films [Internet]. SN Applied Sciences. 2020 ;2[citado 2024 out. 11 ] Available from: https://doi.org/10.1007/s42452-020-2617-3Vancouver
Silva FC da, Tunes MA, Edmondson PD, Lima NB de, Sagás JC, Fontana LC, Schön CG. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films [Internet]. SN Applied Sciences. 2020 ;2[citado 2024 out. 11 ] Available from: https://doi.org/10.1007/s42452-020-2617-3
