Silicon micro-channel definition via ICP plasma etching process using different hard masks (2019)
Source: Abstract Book. Conference titles: AVS International Symposium and Exhibition. Unidade: EESC
Subjects: TRANSFERÊNCIA DE CALOR, RUGOSIDADE SUPERFICIAL, ENGENHARIA MECÂNICA
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ALVAREZ, Hugo da S. et al. Silicon micro-channel definition via ICP plasma etching process using different hard masks. 2019, Anais.. New York, NY, USA: AVS, 2019. Disponível em: https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdf. Acesso em: 17 jun. 2024.APA
Alvarez, H. da S., Diniz, J. A., Ruiz, C. S., Silva, A. R., Cioldin, F. H., & Nascimento Junior, V. S. do. (2019). Silicon micro-channel definition via ICP plasma etching process using different hard masks. In Abstract Book. New York, NY, USA: AVS. Recuperado de https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdfNLM
Alvarez H da S, Diniz JA, Ruiz CS, Silva AR, Cioldin FH, Nascimento Junior VS do. Silicon micro-channel definition via ICP plasma etching process using different hard masks [Internet]. Abstract Book. 2019 ;[citado 2024 jun. 17 ] Available from: https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdfVancouver
Alvarez H da S, Diniz JA, Ruiz CS, Silva AR, Cioldin FH, Nascimento Junior VS do. Silicon micro-channel definition via ICP plasma etching process using different hard masks [Internet]. Abstract Book. 2019 ;[citado 2024 jun. 17 ] Available from: https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdf
