Silicon micro-channel definition via ICP plasma etching process using different hard masks (2019)
- Authors:
- Autor USP: NASCIMENTO JUNIOR, VALTER SALLES DO - EESC
- Unidade: EESC
- Subjects: TRANSFERÊNCIA DE CALOR; RUGOSIDADE SUPERFICIAL; ENGENHARIA MECÂNICA
- Agências de fomento:
- Language: Inglês
- Imprenta:
- Publisher: AVS
- Publisher place: New York, NY, USA
- Date published: 2019
- Source:
- Título: Abstract Book
- Conference titles: AVS International Symposium and Exhibition
-
ABNT
ALVAREZ, Hugo da S. et al. Silicon micro-channel definition via ICP plasma etching process using different hard masks. 2019, Anais.. New York, NY, USA: AVS, 2019. Disponível em: https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdf. Acesso em: 28 dez. 2025. -
APA
Alvarez, H. da S., Diniz, J. A., Ruiz, C. S., Silva, A. R., Cioldin, F. H., & Nascimento Junior, V. S. do. (2019). Silicon micro-channel definition via ICP plasma etching process using different hard masks. In Abstract Book. New York, NY, USA: AVS. Recuperado de https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdf -
NLM
Alvarez H da S, Diniz JA, Ruiz CS, Silva AR, Cioldin FH, Nascimento Junior VS do. Silicon micro-channel definition via ICP plasma etching process using different hard masks [Internet]. Abstract Book. 2019 ;[citado 2025 dez. 28 ] Available from: https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdf -
Vancouver
Alvarez H da S, Diniz JA, Ruiz CS, Silva AR, Cioldin FH, Nascimento Junior VS do. Silicon micro-channel definition via ICP plasma etching process using different hard masks [Internet]. Abstract Book. 2019 ;[citado 2025 dez. 28 ] Available from: https://repositorio.usp.br/directbitstream/030529e6-c5ac-454e-91a8-d19bf7dd63ef/PROD_26260_SYSNO_3153073%20%281%29.pdf - High aspect ratio silicon microchannel definition via ICP plasma etching using SF6/Ar as gas mixture
- Flow boiling of R1336mzz(Z) in open microchannels with diverging manifold
- Theoretical analysis of a sensor for evaluation of liquid film thickness of annular flows in microscale channels
- High-speed imaging of flow boiling in asymmetric dual-V microchannels with tapered manifold
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