High aspect ratio silicon microchannel definition via ICP plasma etching using SF6/Ar as gas mixture (2021)
- Authors:
- Autor USP: NASCIMENTO JUNIOR, VALTER SALLES DO - EESC
- Unidade: EESC
- Subjects: TRANSFERÊNCIA DE CALOR; CIRCUITOS INTEGRADOS; MICROELETRÔNICA; ENGENHARIA MECÂNICA
- Agências de fomento:
- Language: Inglês
- Imprenta:
- Publisher: SBMicro
- Publisher place: São Paulo, SP
- Date published: 2021
- Source:
- Título: Abstracts
- Conference titles: Workshop on Semiconductors and Micro and Nano Technology - SEMINATEC
-
ABNT
ALVAREZ, H. S. et al. High aspect ratio silicon microchannel definition via ICP plasma etching using SF6/Ar as gas mixture. 2021, Anais.. São Paulo, SP: SBMicro, 2021. Disponível em: https://repositorio.usp.br/directbitstream/af37cdf0-62e5-4e55-90a1-799f83a30bb5/PROD_26257_SYSNO_3153042.pdf. Acesso em: 03 nov. 2024. -
APA
Alvarez, H. S., Cioldim, F. H., Silva, A. R., & Diniz, J. A. (2021). High aspect ratio silicon microchannel definition via ICP plasma etching using SF6/Ar as gas mixture. In Abstracts. São Paulo, SP: SBMicro. Recuperado de https://repositorio.usp.br/directbitstream/af37cdf0-62e5-4e55-90a1-799f83a30bb5/PROD_26257_SYSNO_3153042.pdf -
NLM
Alvarez HS, Cioldim FH, Silva AR, Diniz JA. High aspect ratio silicon microchannel definition via ICP plasma etching using SF6/Ar as gas mixture [Internet]. Abstracts. 2021 ;[citado 2024 nov. 03 ] Available from: https://repositorio.usp.br/directbitstream/af37cdf0-62e5-4e55-90a1-799f83a30bb5/PROD_26257_SYSNO_3153042.pdf -
Vancouver
Alvarez HS, Cioldim FH, Silva AR, Diniz JA. High aspect ratio silicon microchannel definition via ICP plasma etching using SF6/Ar as gas mixture [Internet]. Abstracts. 2021 ;[citado 2024 nov. 03 ] Available from: https://repositorio.usp.br/directbitstream/af37cdf0-62e5-4e55-90a1-799f83a30bb5/PROD_26257_SYSNO_3153042.pdf - Silicon micro-channel definition via ICP plasma etching process using different hard masks
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- Theoretical analysis of a sensor for evaluation of liquid film thickness of annular flows in microscale channels
- High-speed imaging of flow boiling in asymmetric dual-V microchannels with tapered manifold
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