Study of sputtering processes, on metallic thin films, due to low energy ion implantation (2013)
- Authors:
- USP affiliated authors: SILVA, TIAGO FIORINI DA - IF ; RODRIGUES, CLEBER LIMA - IF ; RIZZUTTO, MARCIA DE ALMEIDA - IF ; ADDED, NEMITALA - IF ; TABACNIKS, MANFREDO HARRI - IF
- Unidade: IF
- Assunto: FÍSICA NUCLEAR
- Language: Inglês
- Imprenta:
- Source:
- Título: Resumos
- Conference titles: Reunião de Trabalho sobre Física Nuclear no Brasil
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ABNT
ROSA, Edson P. et al. Study of sputtering processes, on metallic thin films, due to low energy ion implantation. 2013, Anais.. Maresias: SBF, 2013. Disponível em: http://www.sbf1.sbfisica.org.br/eventos/rtfnb/xxxvi/sys/resumos/R0151-1.pdf. Acesso em: 01 abr. 2026. -
APA
Rosa, E. P., Delgado, A. de O., Moro, M. V., Trindade, G. F., Silva, T. F. da, Rodrigues, C. L., et al. (2013). Study of sputtering processes, on metallic thin films, due to low energy ion implantation. In Resumos. Maresias: SBF. Recuperado de http://www.sbf1.sbfisica.org.br/eventos/rtfnb/xxxvi/sys/resumos/R0151-1.pdf -
NLM
Rosa EP, Delgado A de O, Moro MV, Trindade GF, Silva TF da, Rodrigues CL, Rizzutto M de A, Added N, Tabacniks MH. Study of sputtering processes, on metallic thin films, due to low energy ion implantation [Internet]. Resumos. 2013 ;[citado 2026 abr. 01 ] Available from: http://www.sbf1.sbfisica.org.br/eventos/rtfnb/xxxvi/sys/resumos/R0151-1.pdf -
Vancouver
Rosa EP, Delgado A de O, Moro MV, Trindade GF, Silva TF da, Rodrigues CL, Rizzutto M de A, Added N, Tabacniks MH. Study of sputtering processes, on metallic thin films, due to low energy ion implantation [Internet]. Resumos. 2013 ;[citado 2026 abr. 01 ] Available from: http://www.sbf1.sbfisica.org.br/eventos/rtfnb/xxxvi/sys/resumos/R0151-1.pdf - Self-consistent ion beam analysis: an approach by multi-objective optimization
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