Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors (2012)
- Authors:
- USP affiliated authors: MASTELARO, VALMOR ROBERTO - IFSC ; ZILIO, SÉRGIO CARLOS - IFSC
- Unidade: IFSC
- DOI: 10.1117/12.928693
- Subjects: FILMES FINOS; SEMICONDUTORES; POLÍMEROS (MATERIAIS); DISPERSÃO DA LUZ; BLENDAS
- Language: Inglês
- Imprenta:
- Publisher: International Society for Optical Engineering - SPIE
- Publisher place: Bellingham
- Date published: 2012
- Source:
- Título: Proceedings of SPIE
- ISSN: 0277-786X
- Volume/Número/Paginação/Ano: v. 8466, p. 84660T-1-84660T-10, 2012
- Conference titles: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors
- Este periódico é de assinatura
- Este artigo NÃO é de acesso aberto
- Cor do Acesso Aberto: closed
-
ABNT
WOOD, Thomas et al. Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors. Proceedings of SPIE. Bellingham: International Society for Optical Engineering - SPIE. Disponível em: https://doi.org/10.1117/12.928693. Acesso em: 03 jan. 2026. , 2012 -
APA
Wood, T., Le Rouzo, J., Flory, F., Coudray, P., Mastelaro, V. R., Pelissari, P., & Zílio, S. C. (2012). Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors. Proceedings of SPIE. Bellingham: International Society for Optical Engineering - SPIE. doi:10.1117/12.928693 -
NLM
Wood T, Le Rouzo J, Flory F, Coudray P, Mastelaro VR, Pelissari P, Zílio SC. Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors [Internet]. Proceedings of SPIE. 2012 ; 8466 84660T-1-84660T-10.[citado 2026 jan. 03 ] Available from: https://doi.org/10.1117/12.928693 -
Vancouver
Wood T, Le Rouzo J, Flory F, Coudray P, Mastelaro VR, Pelissari P, Zílio SC. Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors [Internet]. Proceedings of SPIE. 2012 ; 8466 84660T-1-84660T-10.[citado 2026 jan. 03 ] Available from: https://doi.org/10.1117/12.928693 - Combination of guided mode and photometric optical metrology methods for precise determination of refractive index dispersion: application to polymer blend and ceramic thin films for gas sensors
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Informações sobre o DOI: 10.1117/12.928693 (Fonte: oaDOI API)
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