Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition (2010)
- Authors:
- USP affiliated authors: TSCHIPTSCHIN, ANDRE PAULO - EP ; SOUZA, ROBERTO MARTINS DE - EP
- Unidade: EP
- DOI: 10.1016/j.surfcoat.2010.03.016
- Subjects: DIFRAÇÃO POR RAIOS X; TITÂNIO; FILMES FINOS
- Language: Inglês
- Imprenta:
- Source:
- Título: Surface & Coatings Technology
- ISSN: 0257-8972
- Volume/Número/Paginação/Ano: v. 204, n. 20, p. 3228-3233, 2010
- Este periódico é de assinatura
- Este artigo é de acesso aberto
- URL de acesso aberto
- Cor do Acesso Aberto: hybrid
- Licença: unspecified-oa
-
ABNT
GÓMEZ GÓMEZ, Adriana et al. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition. Surface & Coatings Technology, v. 204, n. 20, p. 3228-3233, 2010Tradução . . Disponível em: https://doi.org/10.1016/j.surfcoat.2010.03.016. Acesso em: 30 dez. 2025. -
APA
Gómez Gómez, A., Recco, A. A. C., Lima, N. B., Martinez, L. G., Tschiptschin, A. P., & Souza, R. M. de. (2010). Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition. Surface & Coatings Technology, 204( 20), 3228-3233. doi:10.1016/j.surfcoat.2010.03.016 -
NLM
Gómez Gómez A, Recco AAC, Lima NB, Martinez LG, Tschiptschin AP, Souza RM de. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition [Internet]. Surface & Coatings Technology. 2010 ; 204( 20): 3228-3233.[citado 2025 dez. 30 ] Available from: https://doi.org/10.1016/j.surfcoat.2010.03.016 -
Vancouver
Gómez Gómez A, Recco AAC, Lima NB, Martinez LG, Tschiptschin AP, Souza RM de. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition [Internet]. Surface & Coatings Technology. 2010 ; 204( 20): 3228-3233.[citado 2025 dez. 30 ] Available from: https://doi.org/10.1016/j.surfcoat.2010.03.016 - Analise comportamental dos coeficientes de atrito e desgaste de sistemas revestidos submetidos a desgaste micro-abrasivo
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Informações sobre o DOI: 10.1016/j.surfcoat.2010.03.016 (Fonte: oaDOI API)
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