Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition (2010)
- Authors:
- USP affiliated authors: TSCHIPTSCHIN, ANDRE PAULO - EP ; SOUZA, ROBERTO MARTINS DE - EP
- Unidade: EP
- DOI: 10.1016/j.surfcoat.2010.03.016
- Subjects: DIFRAÇÃO POR RAIOS X; TITÂNIO; FILMES FINOS
- Language: Inglês
- Imprenta:
- Source:
- Título: Surface & Coatings Technology
- ISSN: 0257-8972
- Volume/Número/Paginação/Ano: v. 204, n. 20, p. 3228-3233, 2010
- Este artigo NÃO possui versão em acesso aberto
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Status: Nenhuma versão em acesso aberto identificada -
ABNT
GÓMEZ GÓMEZ, Adriana et al. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition. Surface & Coatings Technology, v. 204, n. 20, p. 3228-3233, 2010Tradução . . Disponível em: https://doi.org/10.1016/j.surfcoat.2010.03.016. Acesso em: 14 mar. 2026. -
APA
Gómez Gómez, A., Recco, A. A. C., Lima, N. B., Martinez, L. G., Tschiptschin, A. P., & Souza, R. M. de. (2010). Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition. Surface & Coatings Technology, 204( 20), 3228-3233. doi:10.1016/j.surfcoat.2010.03.016 -
NLM
Gómez Gómez A, Recco AAC, Lima NB, Martinez LG, Tschiptschin AP, Souza RM de. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition [Internet]. Surface & Coatings Technology. 2010 ; 204( 20): 3228-3233.[citado 2026 mar. 14 ] Available from: https://doi.org/10.1016/j.surfcoat.2010.03.016 -
Vancouver
Gómez Gómez A, Recco AAC, Lima NB, Martinez LG, Tschiptschin AP, Souza RM de. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition [Internet]. Surface & Coatings Technology. 2010 ; 204( 20): 3228-3233.[citado 2026 mar. 14 ] Available from: https://doi.org/10.1016/j.surfcoat.2010.03.016 - Estudo do comportamento mecânico do conjunto filme cerâmico/substrato metálíco pelo método dos elementos finitos
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