Amorphous carbon nitride (a-CNx) thin films deposited by ECR plasma reactor (2005)
- Authors:
- USP affiliated authors: FANTINI, MARCIA CARVALHO DE ABREU - IF ; GALVAO, RICARDO MAGNUS OSORIO - IF
- Unidade: IF
- Subjects: FÍSICA DE PLASMAS; TOKAMAKS
- Language: Inglês
- Imprenta:
- Source:
- Título: Resumos
- Conference titles: Encontro Brasileiro de Física dos Plasmas
-
ABNT
MATTA, J A S da e FANTINI, Márcia Carvalho de Abreu e GALVÃO, Ricardo Magnus Osório. Amorphous carbon nitride (a-CNx) thin films deposited by ECR plasma reactor. 2005, Anais.. São Paulo: SBF, 2005. Disponível em: http://www.sbf1.sbfisica.org.br/eventos/ebfp/8/sys/resumos/R0099-1.pdf. Acesso em: 28 jan. 2026. -
APA
Matta, J. A. S. da, Fantini, M. C. de A., & Galvão, R. M. O. (2005). Amorphous carbon nitride (a-CNx) thin films deposited by ECR plasma reactor. In Resumos. São Paulo: SBF. Recuperado de http://www.sbf1.sbfisica.org.br/eventos/ebfp/8/sys/resumos/R0099-1.pdf -
NLM
Matta JAS da, Fantini MC de A, Galvão RMO. Amorphous carbon nitride (a-CNx) thin films deposited by ECR plasma reactor [Internet]. Resumos. 2005 ;[citado 2026 jan. 28 ] Available from: http://www.sbf1.sbfisica.org.br/eventos/ebfp/8/sys/resumos/R0099-1.pdf -
Vancouver
Matta JAS da, Fantini MC de A, Galvão RMO. Amorphous carbon nitride (a-CNx) thin films deposited by ECR plasma reactor [Internet]. Resumos. 2005 ;[citado 2026 jan. 28 ] Available from: http://www.sbf1.sbfisica.org.br/eventos/ebfp/8/sys/resumos/R0099-1.pdf - Description and characterization of a ECR plasma device developed for thin film deposition
- Description and characterization of a ECR plasma device developed for thin film deposition
- Plasma cleaning and analysis of archeological artefacts from Spain
- Projeto dos sistemas magneticos do novo tokamak brasileiro tbr-e
- Trapped particle orbits and bootstrap current in low-aspect-ratio tokamaks
- High definition mapping of an argon plasma torch temperature and density
- Self-modulation of a strong electromagnetic wave in a positron-electron plasma induced by relativistic temperatures and phonon damping
- Influence of conducting side limiters on the excitation of alfven waves in tokamak plasmas
- Conjugate influence of current relaxation and of current-vortex sheet formation on the magnetorotational instability
- O Professor Ricardo Galvão fala sobre "Meio Ambiente, Ciência e Censura" [Entrevista]
How to cite
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
