@article{articledb56bc52,
title   = {Deposition and characterization of AlN thin films obtained by radio frequency reactive magnetron sputtering1},
author = {Pelegrini, Marcelo Aparecido and Pereyra, Inés and Alvarado, M. A and Alayo Chávez, Marco Isaías},
year = {2014},
doi = {10.1139/cjp-2013-0556},
journal   = {Canadian Journal of Physics}
}