@inproceedings{inproceedings5d897498,
title   = {Plasma polymerization of hexamethyldisilazane for obtaining surface protection},
author = {Carvalho, Alexsander Tressino de and Carvalho, Rodrigo Amorim Motta and Silva, Maria Lucia Pereira da and Demarquette, Nicole Raymonde},
year = {2001},
publisher = {UNESP},
booktitle   = {Congresso Brasileiro de Aplicação de Vácuo na Industria e na Ciência}
}