@article{article39903a12,
title   = {Deposition and characterization of AlN thin films obtained by radio frequency reactive magnetron sputtering},
author = {Pelegrini, Marcus Vinícius and Alayo Chávez, Marco Isaías and Armas Alvarado, Maria Elisia and Pereyra, Inés},
year = {2014},
doi = {10.1139/cjp-2013-0556},
journal   = {Canadian Journal of Physics}
}