TY - CPAPER TI - Production of hidrogenated amorphous silicon films frow a low frequency glow discharge PY - 1992 AU - Fragalli, J. F. AU - Misoguti, L AU - Nakagaito, A. N. AU - Branz, H. AU - Grivickas, V. AU - Bagnato, Vanderlei Salvador T2 - Workshop on Crystalline and Amorphous Silicon and its Alloys J2 - Proccedings PP - Campinas PB - UNICAMP ER -