@article{article4867b872,
title   = {Study of metal-oxide-semiconductor capacitors with r.f. magnetron sputtering TiOxNy films dielectric layer},
author = {Albertin, Katia Franklin and Pereyra, Inés},
year = {2010},
doi = {10.1002/pssc.200982656},
journal   = {Physica Status Solidi (C)}
}