@article{article52712835,
title   = {Small plasma source for materials application},
author = {Vizir, A and Oks, E M and Salvadori, Maria Cecília Barbosa da Silveira and Teixeira, Fernanda de Sá and Brown, I G},
year = {2007},
doi = {10.1063/1.2766837},
journal   = {Review of Scientific Instruments}
}