@inproceedings{inproceedingsfa5d5886,
title   = {Thermally actuated MEMS all based on PECVD materials obtained at low temperature},
author = {Paez Carreño, Marcelo Nelson and Rehder, Gustavo Pamplona},
year = {2005},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}