@article{articled100f5dc,
title   = {A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films},
author = {Barradas, N P and Added, Nemitala and Tabacniks, Manfredo Harri},
year = {2005},
doi = {10.1016/j.nimb.2004.08.021},
journal   = {Nuclear Instruments & Methods in Physics Research B}
}