TY - JOUR TI - Silicon micromechanical structures fabricated by electrochemical process PY - 2003 AU - Dantas, Michel Oliveira da Silva AU - Galeazzo, Elisabete AU - Peres, Henrique Estanislau Maldonado AU - Ramírez Fernandez, Francisco Javier T2 - IEEE Sensors Journal, SN - 1530-437X DO - 10.1109/icsens.2002.1037163 UR - https://doi.org/10.1109/icsens.2002.1037163 PP - New York VL - 3 IS - 6 ER -