@article{article4f676fa3,
title   = {Correlation between mechanical and electrical properties of silicon oxide deposited by PECVD-TEOS at low temperature},
author = {Gonçalves, Lucas Gonçalves Dias and Viana, Carlos Eduardo and Santos, J. C. and Morimoto, Nilton Itiro},
year = {2004},
doi = {10.1016/s0257-8972(03)01212-x},
journal   = {Surface & Coatings Technology,}
}