@inproceedings{inproceedings0770ea7f,
title   = {Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for MOEMS and optical applications},
author = {Arashiro, Emerson Yasuyuki and Paez Carreño, Marcelo Nelson},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}