@article{articlebc3f5839, title = {High density plasma chemical vapor deposition of diamond-like carbon films}, author = {Mousinho, Ana Paula and Mansano, Ronaldo Domingues and Massi, Marcos and Zambom, Luís da Silva}, year = {2003}, doi = {10.1016/s0026-2692(03)00065-x}, journal = {Microelectronics Journal} }