@inproceedings{inproceedings5180e729,
title   = {Fluorine containing plasma etching surface chemical characterization by coulometric reduction},
author = {Vilca-Melendez, Hugo Antonio and Ruas, Ronaldo and Verdonck, Patrick Bernard and Aoki, Idalina Vieira},
year = {2003},
booktitle   = {Meeting of the International Society of Electrochemistry}
}