@article{articlef9741950, title = {Description and characterization of a ECR plasma device developed for thin film deposition}, author = {Matta, J A S da and Galvao, Ricardo Magnus Osorio and Ruchko, L and Fantini, Márcia Carvalho de Abreu and Kiyohara, Pedro Kunihiko}, year = {2003}, doi = {10.1590/s0103-97332003000100011}, journal = {Brazilian Journal of Physics} }