@inbook{inbook309539b2,
title   = {Determination of the silicon film doping concentration and the back interface oxide charge density using SOI-NMOS gate capacitor},
author = {Sonnenberg, Victor and Martino, João Antonio},
year = {2002},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO 2002}
}