@article{articleac5dfb16,
title   = {Fabrication of diamond flow controller micronozzles},
author = {Silva, S and Salvadori, Maria Cecília Barbosa da Silveira and Kawakita, K and Pereira, Marcos Tadeu and Rossi, W and Cattani, Mauro Sérgio Dorsa},
year = {2002},
doi = {10.1016/s0925-9635(01)00693-8},
journal   = {Diamond and Related Materials}
}