@inproceedings{inproceedings22878dc4,
title   = {Monte Carlo simulation of doping by ion implantation into a-SIC:H},
author = {Oliveira, A. R. and Pereyra, Inés and Páez Carreño, Marcelo Nelson},
year = {2001},
publisher = {SBMicro},
booktitle   = {International Conference on Microelectronics and Packaging}
}