@inproceedings{inproceedingsb0d094b0,
title   = {New method for determining the silicon film doping concentration and the back interface oxide charge density using SOI-MOS capacitor},
author = {Sonnenberg, Victor and Martino, João Antonio},
year = {2001},
publisher = {SBMicro},
booktitle   = {International Conference on Microelectronics and Packaging}
}