@inproceedings{inproceedings19fcb081, title = {The influence of electrode material on argon plasmas}, author = {Ruas, Ronaldo and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Braithwaite, S. J.}, year = {2001}, publisher = {SBMicro}, booktitle = {International Conference on Microelectronics and Packaging} }