@article{articlec9c995b2, title = {Thin films of a-'Si IND.1-X''C IND.X':H deposited by PECVD: the r.f. power and 'H IND.2' dilution role}, author = {Prado, Rogerio Junqueira and Fantini, Márcia Carvalho de Abreu and Tabacniks, Manfredo Harri and Pereyra, Inés and Flank, A M}, year = {2000}, journal = {Materials Science Forum} }