@inproceedings{inproceedingsdc07c033,
title   = {Diffusion and solubility of 'Au' implanted int the Az1350 photoresist},
author = {Kaschny, J R A and Santos, J H R dos and Behar, M and Amaral, Lia Queiroz do},
year = {1999},
publisher = {Friedrich-Schiller-Universitat Jena},
booktitle   = {International Conference on Radiation Effects in Insulators}
}