@inproceedings{inproceedingsc02d3038,
title   = {Method to obtain TEOS PECVD silicon oxide thick layers for optoelectronics devices applications. (em CD-Rom)},
author = {Bulla, Douglas Anderson Pereira and Morimoto, Nilton Itiro},
year = {1997},
publisher = {SBMICRO/EFEI},
booktitle   = {Conference of the Brazilian Microelectronics Society}
}