@article{article7fb11bf9, title = {Formation of carbon nitride - a novel hard coating}, author = {Chubaci, J F D and Ogata, K and Fujimoto, F and Watanabe, S. and Biersack, J. P.}, year = {1996}, doi = {10.1016/0168-583x(96)00087-0}, journal = {Nuclear Instruments and Methods in Physics Research B} }